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M.Sc. Microsystems Engineering

A mostly English-taught Master for graduates with a Microsystems Engineering or related undergraduate degree
  • University profile:
     University of Freiburg
  • Website degree program:
  • Discipline areas:
     IT, Engineering
  • Language of instruction:
     German & English
  • Start at university:
     Winter Semester, Summer Semester
  • Duration

    BIC Preparation Program: 4 months to 1 year
    Master program: 2 years
    In total: 2.3 to 3 years for a Master

  • Academic requirements:

    The largely English-taught Master's degree program in Microsystems Engineering is open to German and international students, who hold an undergraduate degree in an area of study related to Microsystems Engineering, e.g. Electrical Enginerring, Mechanical Engineering or Physics.

    English Language Certification:

    TOEFL ibT 92; IELTS 6.5; native speaker, or at least one semester in the USA, UK, New Zealand, or Australia.


    As of April 10th 2017

    Source: Curricular M.Sc. Microsystems Engineering (MST)

    First year of studies

    During the first semester, students take 7 mandatory courses that cover the fundamentals of Microsystems Engineering. The design of the courses aims to provide the students with a broad base of knowledge in all fields relebant to Microsystems Engineering.

    1st semester
    • Assembly and packaging technology
    • Microelectronics
    • Micro-mechanics
    • Optical Microsystems
    • Sensors/Mirco-actuators
    • Micro-fluidics
    • Microsystems design laboratory I

    In the first year, students also participate, in addition to the theoretical courses, in the so-called Microsystems design laboratory. In this two semester long course, the future Microsystems Engineers focus on an applied design project and thereby receive an insight into the practical implementation of such projects. Here, they shall complete all aspects of the production of microsystems, from the concept over the project planning to the testing, themselves.

    Second year of studies

    During the second to fourth semester, MST students can choose to specialise themselves in three of the following areas of concentration. Through this, everyone can follow their own interests and gain a deeper understanding of two sub-disciplines of Microsystems Engineering.

    2nd - 4th semester

    Three of the following areas of concentration:

    • Circuits and systems
    • Design and simulation
    • Life sciences: Biomedical engineering
    • Life sciences: Lab-on-a-chip
    • Materials
    • Process engineering
    • Sensors and actuators
    Concentration areas

    In the following, you can find some examples of the courses that are offered in the areas of concentration. Amongst these courses are not only lectures, but also practical courses, e.g. labs, projects and seminars.

    Circuits and SystemsDesign and Simulation
    • Analog CMOS Circuit Design
    • Mixed-Signal CMOS Circuit Design
    • VLSI – System Design
    • RF- und Microwave Devices and Circuits
    • Micro-acoustics
    • Radio sensor systems
    • Optoelectronic devices
    • Reliability Engineering
    • Lasers
    • Micro-optics
    • Advanced topics in Macro-, Micro- and Nano-optics
    • Topology optimization
    • Compact Modelling of large Scale Systems
    • Lattice Gas Methods
    • Particle Simulation Methods
    • VLSI – System Design
    • Hardware Development using the finite element method
    • Computer-Aided Design
    Life Sciences: Biomedical EngineeringMaterials
    • Signal processing and analysis of brain signals
    • Neurophysiology I: Measurement and Analysis of Neuronal Activity
    • Neurophysiology II: Electrophysiology in Living Brain
    • DNA Analytics
    • Basics of Electrostimulation
    • Implant Manufacturing Techologies
    • Biomedical Instrumentation I
    • Biomedical Instrumentation II
    • Microstructured polymer components
    • Test structures and methods for integrated circuits and microsystems
    • Quantum mechanics for Micro- and Macrosystems Engineering
    • Microsystems Analytics
    • From Microsystems to the nano world
    • Techniques for surface modification
    • Nanomaterials
    • Nanotechnology
    • Semiconductor Technology and Devices
    Life Sciences: Lab-on-a-chipMEMS Processing
    • DNA Analytics
    • Biochip Technologies
    • Bio fuel cell
    • Micro-fluidics 2: Platforms for Lab-on-a-Chip Applications
    • Advanced silicon technologies
    • Piezoelectric and dielectric transducers
    • Nanotechnology
    Sensors and Actuators
    • Nonlinear optic materials
    • CMOS Microsystems
    • Quantum mechanics for Micro- and Macrosystems Engineering
    • BioMEMS
    • Bionic Sensors
    • Micro-actuators
    • Energy harvesting
    • Electronic signal processing for sensors and actuators

    Aside from studying their areas of concentration, MST students also work on their Master's thesis throughout the third and fourth semester. During this time, everyone works as part of one of the department's 18 research groups and has unrestricted access to the attached laboratories and clean room.